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Micromachining

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INTRODUCTION .
Micromachining is the basic technology for fabrication of micro-components of size in the range of 1 to 500 micrometers. Their need arises from miniaturization of various devices in science and engineering, calling for ultra-precision manufacturing and micro-fabrication.

Micromachining is used for fabricating micro-channels and micro-grooves (see Fig.) in micro-fluidics applications, micro-filters, drug delivery systems, micro-needles, and micro-probes in biotechnology applications. Micro-machined components are crucial for practical advancement in Micro-electromechanical systems (MEMS), Micro-electronics (semiconductor devices and integrated circuit technology) and Nanotechnology.

[pic] Micromachining has evolved greatly in the past few decades, to include various techniques, broadly classified into mask-based and tool-based, as depicted in the diagram below.

While mask-based processes can generate 2-D/2.5-D features on substrates like semiconductor chips, tools-based processes have the distinct advantage of being able to adapt to metallic and non-metallic surfaces alike, and also generate 3-D features and/or free-form sculpted surfaces. However, the challenges of achieving accuracy, precision and resolution persist.

Internationally, the race to fabricate the smallest possible component has lead to realization of sizes ever below 10 µm, even though the peak industrial requirement has been recognized at 100s of µm. thus, the present situation is particularly advantageous for the industry, as the following figure shows graphically.

[pic]
(Ref. T. Masuzawa, CIRP Annals, 2000)

In the future, micromachining is destined to improve upon its shortcomings, as the various micromachining processes become accurate, reliable, versatile and cost-effective. In India, BARC has established premier micromachining and nano-finishing facilities along with state-of-the art metrology systems. On the other hand, IIT Bombay has taken a lead in establishing tool-based micromachining facilities.

With an increasing awareness about the advantages of manufacturing micro-components indigenously instead of importing at high costs, the researchers and industrialists are in need of the knowledge of micromachining technology. The first machining school to cater to the academicians, researchers and folks from industry was organized on 2 to 7 June at IIT Bombay. It was sponsored by Scientific and Engineering Research Council (SERC) of Department of Science and Technology (DST). This Course is sponsored by Quality Improvement Program, AICTE, Govt. of India with the following objectives.
• To generate awareness on the technology of micromachining among various industrial and R&D establishments across India
• To impart fundamental as well as advanced knowledge of this technology to potential users and researchers.
• To provide hand-on training for major micromachining process.

FOCUS AND CONTENTS .

The course will be spread over a period of 5 days, and the overall schedule will be divided amongst the following:
• Series of lectures by noted experts from academia and the industry
• Case-studies and discussion sessions
• Hands-on practical training sessions
• Industrial visits

The course has been laid down to achieve ideal balance between building knowledge-base and getting a supplementary practical experience. The course will focus on:
• Fundamentals of micromachining technology
• R&D activities in micromachining and micro-metrology
• Fundamentals of laser micromachining
• Issues and procedures in mathematical modeling
• Future directions

FACILITIES INVOLVED .

IIT Bombay’s advanced micromachining facilities including CNC tool-based micromachining centre capable of performing micro-EDM, micro-wire EDM, micro-milling, turning and drilling operation, Lambda Physik Excimer Laser system and Zeiss 3D coordinate measuring machine will be used for providing hands-on training. In addition, BARC Mumbai’s advanced Universal measuring machine and Form Talysurf multi-sensing measuring system will also be available for training purpose. Micro and Nano-machining facilities developed at BARC will be a part of the demonstration.

ELIGIBILITY/BENEFITS .

Faculty members of engineering colleges recognized by AICTE are eligible to attend the course. Confirmation of eligible candidates will be on a first come first served basis up to a maximum of 30 candidates. There is no registration fee for the teachers from academic institutions. Outstation participants will be paid return sleeper class (II class) or III AC railway fare from the nearest railway station at their place of work to Mumbai and back as per the rules of QIP scheme. Boarding and lodging will also be provided free of cost. Since accommodation in IIT guest house is limited, family members of the participants cannot be accommodated. Maximum number of participants will be 30.

REGISTRATION .

The interested applicants may download the registration form from the following URL: www. me.iitb.ac.in/~micromcing The filled form has to be sent to the school organizer and the participants will be intimated upon their selection, as per the dates mentioned below.

IMPORTANT DATES .

Registration form due: 22nd May 2009 Intimation of selection: 25th May 2009 Confirmation of acceptance: 28th May 2009 (by the participants)

VENUE .

Conference Hall, Ground Floor, Jalvihar IIT Bombay Guest House Mumbai

COMMITTEE .

Organizing committee:

• Prof. Suhas S. Joshi, IIT Bombay
• Prof. Ramesh Singh, IIT Bombay

Advisory Committee:
• Dr. R. Balasubramaniam, BARC Mumbai
• Dr. V. K. Suri, BARC Mumbai
• Prof. N. Ramakrishnan, IIT Bombay

Distinguished Invited Speaker:
• Professor Shiv G. Kapoor, University of Illinois, Urbana-Champaign, USA

CONTACT DETAILS:

Dr. Suhas S. Joshi Professor Department of Mechanical Engineering Indian Institute of Technology, Bombay Powai, MUMBAI -400076 (India) Ph: 91 22 2576 7527 (O)/2576 8527 (R) Fax: 9122 2572 6875 Email: ssjoshi@iitb.ac.in

QIP SHORT TERM COURSE

On

MICROMACHINING AND MICROFABRICATION

June 08 -12, 2009

[pic]

Organized by Department of Mechanical Engineering Indian Institute of Technology Bombay Powai, Mumbai – 400 076 India
-----------------------
Anisotropic
Process

Isotropic Process

Solid Tool

Image Tool

Micromachining

Mask based

Tool based

• Wet etching
• Ion beam machining
• LIGA
• Laser beam machining

• Wet etching • Plasma etching • Electroforming • • Laser beam • Electron beam • Ion beam • Excimer laser • • Cutting • Grinding • Milling • EDM • ECM • Punching • Pressing • Injection •
SERC School on Micromachining

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