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Micro Ultrasonic

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EXPERIMENTAL STUDY OF MICRO ULTRASONIC MACHINING
PROCESS
Sreenidhi Cherku, Murali M Sundaram, and K P Rajurkar
Center for Nontraditional Manufacturing Research
University of Nebraska-Lincoln
Lincoln, Nebraska, USA
INTRODUCTION
Micro ultrasonic machining (micro USM), is one of the efficient material removal processes especially suitable for the micromachining of hard and brittle materials.
The principle of micro USM is shown in Figure 1.
In micro USM workpiece which is placed on the workpiece table vibrates at ultrasonic frequency
(40 KHz). Abrasive slurry is injected on the top of the workpiece. There is a rotating tool which hits the abrasive particles in the slurry which in turn hit the workpiece and chip away the material from it. The vibrations given to the workpiece aid in refreshing the slurry so that fresh abrasive particles are in contact with the workpiece and also in removing the debris from the tool workpiece gap [1-4].

In many conventional machining processes like grinding, milling and broaching processes oil has been successfully used as cutting fluid. These oils can be used either as straight oils, which are pure petroleum based oils or emulsifiers which are water based oils. Use of straight oils have excellent lubricating properties and are used especially for machining process involving low speeds, low clearance requiring high quality surface finish. These oils have more viscosity and good lubricating properties than water and causes less tool wear. Hence, it may be prudent to use oil based slurry in micro USM. This paper reports the experimental inverstigation of the same. SYSTEM DESIGN
An in-house built experimental micro USM system based on the design concept of
“vibration on work piece [5,6]” is schematically shown in Figure 2.

FIGURE 1. Principle of USM
The abrasive slurry acts as lubricating agent as well as coolant in reducing the frictional heat generated due to the movement of the abrasive particles on the workpiece and heat generated by the vibrations due to the transducer. The slurry also collects the debris from the machined area. In general micro USM is carried out with water as the medium due to its properties of excellent coolant, easy removal of debris from machining zone due to low viscosity, low cost and easy availability.

FIGURE 2. Schematic of in-house built Micro
USM
A micro tool, attached to a mandrel rested on Vshaped block is rotated by a DC motor and is free to move in X, Y and Z directions with six degrees of freedom. Micro tools with different diameters are prepared by wire Electrical
Discharge Grinding (WEDG). The micro tool is

sensitive to elastic bending, vibration, and breakage. Therefore, the contact force between tool and workpiece needs to be controlled and limited to a certain level during machining. This is achieved by implementing a close-loop control strategy with force feedback.
Key system components such as electronic balance and three-axis stage have high resolution (0.1 mg and 25 nm, respectively) to meet the demand of accuracy in micro machining.
EXPERIMENTAL RESULTS & DISCUSSION
The machining parameters used in the study are listed in Table 1.
TABLE 1. Machining parameters
Control Variable
Applied Load
Vibration amplitude
Rotational Speed
Abrasive Particle Size
Abrasive concentration
Medium of the slurry
Tool Diameter
Vibration amplitude
Tool Material
Work Piece Material
Abrasive Material

Setting
3g
1 µm
1000RPM
0~0.5, 1~3, 3~5
0.5%,1%,3%
Water, Oil
180 µm
1 µm
Tungsten
Silicon Wafer
Poly Crystalline
Diamond

FIGURE 3. MRR vs Concentration for particle size 0~0.5
Using medium sized particles as shown in
Figure 4, MRR increases with the increase in the concentration as there are cutting edges for a given volume of abrasive slurry. The MRR is more when machined with oil compared to water as shows the comparison of MRR between water based and oil based slurry with respect to the varying abrasive slurry concentrations for the particle size of 1~3.

Holes with drill depth of 30 µm are drilled on the silicon wafer. Each of these experiments are repeated thrice and the averaged to analyze the results. Material removal rate (MRR)
In machining with fine sized grains as shown in
Figure 3, the MRR increases with the increase in the abrasive particles due to increase in the number of particles involved in the machining.
MRR is more when machining with the water as oil is more viscous than water hampers the process of debris removal in the processing of machining thus accounting for less MRR.

FIGURE 4. MRR vs Concentration for particle size 1~3
When machining with coarser grains as shown in Figure 5, the MRR is more when machined in aqueous medium compared to oil. As the grains become coarser the grain boundaries try to interlock reducing the number if cutting edges.
Oil possessing more viscous property interlocks these grains strongly compared to water thus contributing to less MRR.

Using medium sized abrasives the surface roughness shown in Figure 7, with the increase in the concentration the particle size decreases in the process of machining, indicating more number of particles to absorb the heat generated during the process which eventually reduces the surface roughness. However surface roughness for oil is less compared to water since water acting as coolant absorbs the generated heat.

FIGURE 5. MRR vs Concentration for particle size 3~5
It is observed that machining with water based slurry is more suitable for finer particles sizes with higher concentration or medium particles sizes with medium concentration or coarser particle sizes with lower particles where as machining with oil based slurry is always suitable for all the particle sizes with low concentration. Surface Roughness
When machining with finer grains the surface shown in Figure 6, finer grains having constant cutting edges hit the workpiece repeatedly.
Further the debris is added in the process of material removal increasing the frictional heat making the surface rougher with the increase in the concentration. However oil acting as coolant reduces the surface roughness to some extent.
Thus producing good surface finish compared to machining in water medium.

FIGURE 7. Surface Roughness vs
Concentration for Particle Size 1~3
When machining with coarser size grains as shown in Figure 8, as the concentration increases there are more coarser particles hitting the work surface thus making it rougher.
Since oil acts as better coolant than water thus giving better surface finish.

FIGURE 8. Surface Roughness vs
Concentration for Particle Size 3~5
FIGURE 6. Surface Roughness vs
Concentration for Particle Size 0~0.5

Finally it is observed that machining with oil based slurry gives good surface finish compared

to the water based slurry. Furthermore good surface finish is given by machining with the finer particles whereas machining with coarser grains gives poor surface finish.
Machining Mode in Oil Based and Water
Based Slurry
It is evident from the SEM images of the holes drilled that brittle machining mode occurs when machining with oil where as ductile machining occurs when machining with water. Oil possessing the property of more viscosity acts as good lubricant displacing the particles in the machining zone without indenting the surface and just scratching it thus machining in the brittle mode. However the particles in the machining zone are constant without being displaced when water is used, particles protruding into the surface of the workpiece indenting it thus machining in ductile mode.
The ductile and brittle machining mode can be differentiated according to the particle size used in machining [7]. Use of smaller particle size results in ductile machining mode as there are number or particles in the machining zone, distributing the applied static load in machining among many small particles and reducing the net force applied per particle, just scratching the surface leading to ductile machining mode.
Machining with larger particles involves more static load per particle as there are less particles thus indenting the surface leading to brittle machining mode.
SUMMARY
This paper presents the results of micro ultrasonic machining using oil based abrasive slurry. An in-house built experimental setup was used to conduct designed experiments. The influence of process parameters such as slurry medium, slurry concentration, and abrasive particle size on the performance of micro USM
Material Removal Rate (MRR) and Surface
Roughness (SR) is reported. It is evident from the experimental study that machining with water based slurry is suitable only for finer particles sizes with higher concentration or medium particles sizes with medium concentration or coarser particle sizes with lower particles where as machining with oil based slurry is always suitable for all the particle sizes with low concentration. Further the study reveals that machining with oil based slurry gives good surface finish compared to the water based slurry. Good surface finish is given by machining

with the finer particles whereas machining with coarser grains gives poor surface finish.
ACKNOWLEDGEMENTS
The financial support from the NSF under grant number CMMI – 0728294 and DMI – 0355380 is acknowledged. REFERENCES
[1] T.B.Thoe,
D.K.Aspinwall,
M.L.H.Wise.
Review
on
Ultrasonic
Machining.
International Journal of Machine Tools &
Manufacturing. Vol.38; pp.239-355; 1998.
[2] Z.Yu, K.P.Rajurkar, A.Tandon. Study of 3D
Micro-Ultrasonic Machining. Journal of
Manufacturing Science and Engineering.
Vol.126; 2004.
[3] X.Hu, Z.Yu, K.P.Rajurkar. State of the art investigation and research issues in micro ultra sonic machining. ASME International
Conference on Manufacturing Science and
Engineering. 2006.
[4] Z.Yu, X.Hu, K.P.Rajurkar. Influence of debris accumulation on material removal and surface roughness in micro ultrasonic machining of silicon. Annals of CIRP.
Vol.55; pp. 201-204; 2006.
[5] K. Egashira, T. Masuzawa, M.Fujino,
X.Q.Sun. Applications of USM to
Micromachining by On-the –machine Tool
Fabrication. International Journal of
Electrical Machining. Vol.2; pp.31-36; 1997.
[6] K. Egashira, T. Masuzawa. Micro Ultrasonic
Machining by the Application of Work Piece
Vibration. Annals of CIRP.Vol.48; pp.131134; 1999.
[7] M.M.Sundaram, C.Sreenidhi, K.P.Rajurkar.
Micro Ultrasonic Machining Using Oil based
Abrasive Slurry. Accepted for Publication in the Proceedings of the 2008 International
Manufacturing Science and Engineering
Conference. Oct 7-10; 2008.

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